@InProceedings{BerniPaesGalv:2018:SpLiIn,
               author = "Berni, Luiz Angelo and Paes, T. F. and Galv{\~a}o, E. C. S.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and 
                         {Universidade Federal da Bahia (UFBA)} and {Universidade Federal 
                         de S{\~a}o Paulo (UNIFESP)}",
                title = "Spectroscopy liquid infiltration method for measuring porous 
                         silicon properties",
                 year = "2018",
         organization = "Encontro Nacional de F{\'{\i}}sica da Mat{\'e}ria Condensada 
                         (ENFMC)",
             abstract = "Porous silicon can be formed by electrochemical etching in 
                         hydrofluoric acid solution. Due to the large surface area and 
                         photoluminescent properties, porous silicon has attracted the 
                         interest of several areas, such as, microelectronics, 
                         optoelectronics, chemical and biological sensors, batteries, solar 
                         cells and biomedical devices. In the laboratory, porous silicon 
                         was formed by low resistivity p-type monocrystalline silicon 
                         wafers under several conditions of current density, solution 
                         concentration and etching time [1]. In order to measure the 
                         thickness, refractive index and porosity of the porous silicon 
                         layer, it was assembled in the laboratory a system that operates 
                         with the spectroscopy liquid infiltration method. This method is 
                         non-destructive and fast execution, which enables to measure the 
                         properties of the porous layers in few minutes [2]. The method 
                         consists in measuring the reflectance of the porous silicon layer 
                         immersed in two distinct media, for example, air and alcohol. The 
                         analysis of the obtained Fabry-Perot interference spectra allows 
                         to estimate the properties of the porous layer. This work presents 
                         details of the assembled system and results obtained from several 
                         samples. The results obtained with the spectroscopy liquid 
                         infiltration method were also compared with the high-resolution 
                         scanning electron microscopy data.",
  conference-location = "Foz do Igua{\c{c}}u, PR",
      conference-year = "06-11 maio",
             language = "en",
        urlaccessdate = "27 abr. 2024"
}